1963年に久保徳雄氏が東京放送の出資を受けて設立した東京エレクトロン研究所が起源。
1964年にフェアチャイルド社の総代理店権を得て、2000年3月期には自社製品比率94.9%の装置メーカーへ移った。売上の約9割を海外で得る半導体製造装置の大手である。
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