1960年に内山康氏が東京で興した東京ITV研究所が起源。
1976年に世界初のフォトマスク欠陥検査装置を公表し、2017年にEUVマスクブランクス欠陥検査装置を世界で初めて実用化した。EUVマスク検査で世界シェア100%を占める半導体検査装置メーカー。
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